Seeking service: DRIE of quartz or pyrex

I am seeking a company or fab that can do deep etching (~ 15 um)
with vertical sidewalls into quartz or pyrex with a minimum feature size of
6 um.

These will be small wafer batches (~ 10 wafers/batch), as they are for
prototype devices.  Any information would be useful.  As I will be
attending several conferences over the next two weeks, the best method of
contact is email.

Thank you, in advance, for your time and information.

Antimony L. Gerhardt

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Antimony L. Gerhardt
Research Assistant

Microsystems Technologies Laboratories

Massachusetts Institute of Technology
60 Vassar Street, Building 39-511
Cambridge, Massachusetts 02139-4307

Phone 617.253.0446
Fax     617.253.5228
Email  antimony@mtl.mit.edu
http://www-mtl.mit.edu

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