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MEMSnet Home: MEMS-Talk: Strain of SiO2 and SixNy on Ge
Strain of SiO2 and SixNy on Ge
2003-05-19
Jack Tong
Strain of SiO2 and SixNy on Ge
Jack Tong
2003-05-19
Hi folks,
I wonder if anyone knows about the strain of SiO2 and
SixNy on Ge. I tried LTO oxide (450oC), but it seems
that there is tensile strain in oxide layer. I want to
find film with no strain or a little bit compressive.
Any info is appreciated.
Thanks.
Song


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