You might try a 5% HCL dip for 30 seconds.

Justin C. Borski
MEMS Program Manager
Advanced MicroSensors Inc.
[email protected]
www.advancedmicrosensors.com



-----Original Message-----
From: Allen Chou [mailto:[email protected]]
Sent: Wednesday, May 21, 2003 7:11 PM
To: [email protected]
Subject: [mems-talk] etch of tungsten oxide


Hi,

Does any one know any chemical that can remove the
oxidized surface tungsten film without appreciable
damage on the tungsten?

Thanks,

Allen

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