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MEMSnet Home: MEMS-Talk: Mask Aligner
Re: Fwd: boron implant (fwd)
2003-05-23
Ravi Shankar
Mask Aligner
2003-05-23
Sreemanth M Uppuluri
2003-05-27
R. Brent Garber (2 parts)
Mask Aligner
Sreemanth M Uppuluri
2003-05-23
Hello All,

I am looking for a vacuum chuck similar to the one found in mask aligners
for performing contact lithography experiments. Please let me know if
anyone has some information regarding it.

Thanks
Sreemanth

************************************************************
Sreemanth M Uppuluri
Graduate Research Assistant
Center for Laser Micro-Fabrication
School of Mechanical Engineering
Purdue University

Phone: 765-494-5638 (Office), 765-463-9560 (Home)
Email: uppuluri@ecn.purdue.edu, sreemanth@hotmail.com



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