Dear Colleagues,

Am searching for practical information / experience on thermal oxidation after
DRIE Bosch process.
I'm using SOI wafers and i want to oxide the wafers after the DRIE step
Does anybody know if this process is possible?
Any experiences, information, recipes, etc would be greatly appreciated.

Best regards,

Benoît GAULIER.

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   Benoît GAULIER
   Ingénieur Filière Microtechnologie
   THALES AVIONICS
   NAVIGATION
   25, rue Jules Védrines 26027 Valence CEDEX
   Télécopie: (+33) (0) 4-75-79-86-06
   Bureau: (+33) (0) 4-75-79-88-25
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