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MEMSnet Home: MEMS-Talk: Need etchant for PtSi
Need etchant for PtSi
2003-06-09
Chad D. Hudson
Need etchant for PtSi
Chad D. Hudson
2003-06-09
Can someone tell me what I could use to wet-etch PtSi on SiC wafers?  I
am trying to cut shapes into a wafer to reduce leakage current during
testing.

Thanks,
Chad D. Hudson
Bradley Department of Electrical and Computer Engineering
Virginia Tech



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