Hello David,
You can contact Tim Pyle at Aquabond Technologies. They have a wax that
comes in stick form and also in sheets. He can help answer your
questions regarding its resistance to the solvent. I do know that this
wax does not leave a residue after removal.
tpyle@aquabondtechnologies.com
If you have questions on dicing blades for your wafers or other
materials please let me know,
Mario Robles
Tanaka Systems, Inc.
2577 Leghorn Street
Mountain View, CA 94043
650-966-8001 ofc
650-966-1881 fax
www.dicingblades.com
Dicing Blades * Backgring Wheels * CMP Pad Conditioners
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of David Nemeth
Sent: Tuesday, June 10, 2003 8:33 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Wafer mounting
I am mounting a wafer with large holes in it onto another wafer in order
to
spin resist on it. The wafer is delicate, so I'm mounting it with black
wax. However, I find the resist solvent (I'm using AZ4210) attacks the
blackwax a little, leaving a residue on the wafer.
Clear wax (I forget which kind) which dissolves in acetone is worse - it
dissolves in the photoresist solvent, and creates large, unpatternable
areas
when I spin it.
Because of the fragility of the wafer, I need something that melts so I
can
slide the wafer off easiliy, so using photoresist itself as an adhesive
won't work.
Has anyone else encountered this problem? Does anyone know of a
mounting
wax that is not attacked by the photoresist solvent?
David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576
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