> Thanks for your help. Found a number on Clariant's web page and found they
renamed it from AZ4620 to AZ P4620. Go figure. Thanks again.
>
Its not renamed, rather its a replacement ...
According to -
H. M. Miyajima, M., "High-aspect-ratio photolithography for MEMS
applications," Microelectromechanical Systems, Journal of, vol. 4, pp.
220-229, 1995.
AZ4620 contained a hazardous chemical and AZP4620 is a replacement of it
(hopefully much safer), though both of them have similar performace, AZP4620
coats slightly thinner than Az4620 and development time is reduced for
AZP4620 over AZ4620 for comparable thickness.
-Sunil.
Optical Semiconductor & Devices
EEE, Imperial College
London UK SW7 2BT