Hi Deepti,

You might try placing a relatively opaque metal sputter coating on the
backside of the glass substrate, such as TiW or chrome.  Then remove this
metal at the end of your process using a selective wet etch chemistry.  Try
600 Angstroms or more.

The metal will at least mimic more of a standard situation, and it will
prevent reflections off of your exposure chuck from bouncing up at unusual
angles.

- Justin

Justin C. Borski
MEMS Program Manager
Advanced MicroSensors Inc.
[email protected]
www.advancedmicrosensors.com
www.smalltimes.com/document_display.cfm?document_id=6321


-----Original Message-----
From: Deepti Terala [mailto:[email protected]]
Sent: Thursday, July 10, 2003 2:47 PM
To: [email protected]
Subject: [mems-talk] help


hi,
I need to make SU8 micropatterns on glass substrate.  I used Pyrex glass to
pattern SU8 but it was  of no use as it scattered UV light. please help me
in
chosing an appropriate glass substrate such that I get rid of my problem

thank you

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