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MEMSnet Home: MEMS-Talk: poly on psg
poly on psg
2003-07-11
CK Lin
2003-07-15
Hardy, Buzz
poly on psg
CK Lin
2003-07-11
hello,

I am trying to deposit 1um polysilicon on top of a cured PSG layer.  The psg
layer will act as in situ doping source as well as sacrificial layer.  Does
anyone know of any foundry that will allow such process?

thanks for all your help.



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