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MEMSnet Home: MEMS-Talk: [Help] Cu etchant
[Help] Cu etchant
[Help] Cu etchant
2003-07-22
Yoon Seung Wook
[Help] Cu etchant
Yoon Seung Wook
2003-07-22
Hi! I'm now looking for Cu etchant. I want to etch 30umx30um small
pad.But both of the HNO3 and FeCl3 based one did not give uniform
etching over 6 inch wafers. If you have any etchant to get uniformity of
Cu etching, please kindly inform me.Thanks in advance.
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