Dear Members:
I have a polysilicon surface with steps. I donot know whether it is possible
to remove the steps using RIE. Can anybody recommend a coating material which
has almost the same etching speed as polysilicon in RIE, so I can etch back p-
si and get a flat surface?

If you have any other ideas, please also let me know.

thanks for your help.

Regards,
Yilei Zhang