> From: 
>
> Does anybody know how to calculate a comprresive stress from
> a out-of-plane deformation
> value of free-standing membrane? Or could you tell me related
> paper or reports? I have a free-standing Si square membrane
>
> Hideki Eda

   An excellent paper on the subject is Ziebart et al, "Strongly buckled
square micromachined membranes," in J MEMS 8(4), p423.  They provide
equations relating deflection to compressive stress for different
buckling modes.

John Maloney
MEMS Engineer
MicroCHIPS, Inc.
http://www.mchips.com
http://john.maloney.org