The bleach will also etch Titainium! It seems like I've seen other
solutions used for generating Ag-AgCl. Will your device tolerate KCl? If
so look into using that.
-Mike
>>> Jason.Viotty@c2v.nl 08/07/03 03:39AM >>>
Hiroaki, I think that the problem you saw with the Cr adhesion layer is
due
to the fact that the Cr is atacked by the chlorine. HCl is a known
etchant
for Cr, so I would expect for it to also be atcked by that chlorine
based
solution you used. You could probably try using Ti or Ta as the
adhesion
layer. For as far as I know, these are not attacked by HCl. You would
have
to see however if these metals are compatable with the rest of your
processing. Ti for example is attacked by HF-based solutions and by
KOH.
Ok, succes.
Jason
___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl
___________________________________________________________
-----Original Message-----
From: Hiroaki SUZUKI [mailto:hsuzuki@iis.u-tokyo.ac.jp]
Sent: woensdag 6 augustus 2003 2:52
To: General MEMS discussion
Subject: [mems-talk] Ag-AgCl electrode
Hi all
Has anyone tried to pattern an Ag-AgCl electrode on either glass or
siliocon
substrate? I deposited and patterned Ag and immersed in chlorine based
bleach solution, but Ag easily peels off.
Although Ag-AgCl electrode is very often used for the electrical
detection
of biological stuff, I don't see it in Bio-MEMS literatures. Most
people use
Ti/Au or Cr/Au electrode. But in my observation, Cr as an adhesion
layer
elutes when the current flows and the electrode peels off as well.
Any suggestion/discussion would help.
Thanks,
----------------------------
Hiroaki SUZUKI
The University of Tokyo
Institute of Industrial Science (IIS)
----------------------------
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