Hi Lisen,
   There's TMAH in that developer! If you absolutely must use aluminum,
reverse the polarity of your mask(s) and use negative resist.

-Mike

>>> lswang2001@yahoo.com 08/08/03 02:35PM >>>
Hi,there,
Anyone has experience with patterning Al. I got
problem when developing the photoresist, the Al layer
is etched by the developer. I tried SHipley and AZ
resists, but both have the same problem. THanks
Lisen

__________________________________
Do you Yahoo!?
Yahoo! SiteBuilder - Free, easy-to-use web site design software
http://sitebuilder.yahoo.com

_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk

Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/