Hi, Can anyone suggest a dry etch recipe of AlGaAs/GaAs DBR mirror? What gases are needed? Thanks! Changping
GIF89a ³ ÿ` Ï` Ï/ Ï`/ÿ// `/ ÿ`/ÿÿÿ !ÿ NETSCAPE2.0 !ù , UÉI«&ë¯D(QBQ£* ¤ 8 K ¨+зCô~CÉ8 :J¯
