Does anyone have a recommendation for a conformal layer of PMMA? I have
8 micron steps that have been difficult to cover. I have succeeded with
a  bilayer of PMMA, each layer being 1.6 microns, for a total of 3.2
microns. At that thickness, though, ebeam lithography becomes very
difficult.

Thanks,

Randy Grow
Ph.D. Candidate
Dept. of Applied Physics
Stanford University