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MEMSnet Home: MEMS-Talk: Re: Silicon-Pyrex wafers
First Reactive ion etching profile simulators/simulations
2003-08-29
Burkhard Volland
Re: Silicon-Pyrex wafers
2003-08-29
Tiansheng Zhou
Re: Silicon-Pyrex wafers
Tiansheng Zhou
2003-08-29
Hi All:
I am interested in purchasing 4" silicon pyrex bonded wafer.
Thickness: silicon 75 um +/- 5 um; Pyrex 500 um.
Thanks a lot!
Tiansheng


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