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MEMSnet Home: MEMS-Talk: Working with SU-8 on plastic substrates?
Working with SU-8 on plastic substrates?
2003-08-29
ROBERT DAVIES
2003-09-02
Christopher F. Blanford
2003-09-03
Michael D Martin
Working with SU-8 on plastic substrates?
ROBERT DAVIES
2003-08-29
Hello Everyone,

I am new to playing with SU-8. Rather than spin coat and process on silicon I
wish to replace the silicon wafer with a plastic substrate to which the SU-8.
Compatibility of the SU-8 with the plastic requires that:
1        The resist must adhere to the plastic
2      Solvent in SU-8  and developer must not swell or dissolve the plastic
3    Plastic should expand and contract isotropically during the baking and
cooling processes with a similar thermal expansion coefficient to the SU-8
(polymerised.

Does anyone out there have any suggestions about a suitable plastic ?
If you do and it is them my life gets easier.

Many thanks to you all.

Bob
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