Passivation material for Si KOH-etching and Protection method
shpaek
1997-11-06
Dear MEMS ;
I'm searching a passivation material for Si KOH-etching.
It takes a long time for Si etching and
I must protect front side of wafer.
Al layer is deposited on the Front side.
Does anyone tell me the material and method of protection?
Si etch thickness ; 450 micron
Si etch solution ; KOH + IPA
I'll wait for your quick response.
Sincerely yours.