Hi MEMS workers,
I have a question about tempeature sensing in MEMS. I
had heard something about sensing the temperature
using a serpentine structure on the substrate.
However; I could not find much information on the web
regarding this. I am also interested in other methods
of sensing temperature of the ambient air in the same
scale.
It would be a great help to my efforts if somebody
could suggest me a link or any literature to help me
how it can be sensed.
Thanks a lot for the kind of help you guys have been
providing from this thread. I hope i can get some this
time too..
Thanks a lot and regards!
ramji Dhakal
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Ramji Dhakal
M S Mechanical Engineering,
SUNY Binghamton, NY
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