Nominal parameters for SU-8 can be found in the datasheets on the right
hand side of this page:
http://www.microchem.com/products/su_eight.htm
You will probably have to tweak them, but they are a good starting
point.
I've never used AZP4620.
Greg Reimann
Boston University
Precision Engineering Research Lab
-----Original Message-----
From: mems-talk-bounces+gjreiman=bu.edu@memsnet.org
[mailto:mems-talk-bounces+gjreiman=bu.edu@memsnet.org] On Behalf Of
Ramparsad Khosla
Sent: Monday, September 22, 2003 11:11 PM
To: General MEMS discussion
Subject: [mems-talk] PHOTORESIST
Hi
Can anyone help me get the proper parameters to working with photoresist
like AZP4620 and SU-8?
Thanks a lot
KHOSLA Vicky
NUS Undergrad
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