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MEMSnet Home: MEMS-Talk: Question about wafer level Au-Au TC bonding
Question about wafer level Au-Au TC bonding
2003-09-24
Wang Qian
2003-09-24
Robert Dean
Question about wafer level Au-Au TC bonding
Wang Qian
2003-09-24
Dear MEMS-talk members,

I am currently try to make wafer level Au-Au thermocompression bonding for
4-inch
wafer. Is there anybody having such kind of expeience can tell me
requirement for
the thickness of Au layers in both side and prefered metallization layer
under Au layer?

Thanks in advance,
Wang Qian

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