Hello,List Members
SDI Semiconductor Instruments Group has many items of MEMS manufacturing
equipment for sale .
It is listed on our website at www.fabsurplus.com.
The equipment includes:-

> Etcher
>
> Alcatel
>
> 601E
>
> Yes
>
> 6"
>
> May '00
>
> Qty 2 available- Price each $295K USD
>
> SORT01,02
>
> Sorter
>
> Brooks
>
> SCS2000
>
> Yes
>
> 6/8"
>
> Sept '01
>
> Qty 2 Available
>
> 10029
>
> Mask Cleaner
>
> EVG
>
> EV 301
>
> N.A.
>
> N.A.
>
> May '00
>
> Crated for shipping
>
> 99000205
>
> Spin Dryer
>
> Fluorocarbon
>
> Standard
>
>
>
> 2000
>
> Crated for shipping
>
> SACR01
>
> Wet Acid Etch 
>
> F.S.I
>
> Excalibur
>
> Yes
>
> 6"/8"
>
> Aug '01
>
> Installed, SMIFFed
>
> 10056
>
> Poly Dry Etcher 
>
> LAM
>
> 4420XL
>
> Yes
>
> 6"
>
> May '00
>
> Price $195,000 USD.Crated
>
> 10055
>
> Poly Dry Etcher 
>
> LAM
>
> 4420XL
>
> Yes
>
> 6"
>
> May '00
>
> Crated for shipping- price reduced
>
> 10054
>
> Dielectric Dry Etcher 
>
> LAM
>
> '4520
>
> Yes
>
> 6"
>
> May '00
>
> Crated for shipping- price reduced
>
> 10002
>
> Vertical Furnace 
>
> Kokusai
>
> DJ-853V
>
> Yes
>
> 6"
>
> Jan '00
>
> NEVER USED $160,000 USD
>
> 10001
>
> Vertical Furnace 
>
> Kokusai
>
> DJ-853V
>
> Yes
>
> 6"
>
> Jan '00
>
> NEVER USED,CRATED $275,000 USD
>
> 10006
>
> Horizontal Furnace 
>
> Kokusai
>
> BDF-200
>
> Yes
>
> 6"
>
> Jan '00
>
> UNUSED $140,000 USD
>
> 10004
>
> Horizontal Furnace 
>
> Kokusai
>
> BDF-200
>
> Yes
>
> 6"
>
> Jan '00
>
> UNUSED $195,000 USD
>
> 10003
>
> Horizontal Furnace 
>
> Kokusai
>
> BDF-200
>
> Yes
>
> 6"
>
> Jan '00
>
> UNUSED $195,000 USD
>
> FRAME 01
>
> Mounting Frame
>
> Lintec- Disco
>
> RAD 2500 M8
>
> Yes
>
> 6/8"
>
> Feb '02
>
>
> 10045
>
> Stripper/Low temp asher
>
> Matrix
>
> '105
>
> No
>
> 6"
>
> Oct '00
>
> $75,000 USD- NEVER USED
>
> ASH01
>
> Asher
>
> Matrix
>
> BOBCAT 208S
>
> Yes
>
> 6/8"
>
> Aug '01
>
> $130,000 USD
>
> SRD01
>
> Spin Dryer
>
> Semitool
>
> SRD280S
>
> Yes
>
> 6"
>
> Aug '01
>
>
> 10018
>
> Developers
>
> S3
>
> Flexifab Modular
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10021
>
> Developers
>
> S3
>
> Flexifab Modular
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10019
>
> Spray Developers
>
> S3
>
> Flexifab Modular
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10023
>
> Coaters
>
> S3
>
> Flexifab Modular
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10023
>
> Coaters
>
> S3
>
> Multifab
>
> Yes
>
> 6"
>
> Jun '00
>
>
> COAT01
>
> Resist Coat
>
> Suss MicroTec
>
> Falcon Coat
>
> Yes
>
> 6/8"
>
> May '01
>
>
> DEV01
>
> Resist Dev.
>
> Suss MicroTec
>
> Falcon Developer
>
> Yes
>
> 6/8"
>
> May '01
>
>
> ALIGN01
>
> Mask Aligner
>
> Suss MicroTec
>
> MA200 CC NT
>
> Yes
>
> 6/8"
>
> May '01
>
>
> 10048
>
> 3 Chamber Si Etch (in Crate) 
>
> STS
>
> Aspect Cluster
>
> Yes
>
> 6"
>
> Jun '00
>
>
> Deep Silicon Etch for MEMS deep trench process
>
> 10235-38
>
> Quartz Loader
>
> Mactronix
>
>
> No
>
>
> Sep '00
>
> Qty 4 available
>
> STEP01
>
> G-line stepper 
>
> UltraTech 
>
> Titan I
>
> YES
>
> 6"
>
> Dec '01
>
> Excellent condition, still in the cleanroom. Available immediately for
> saleprice $800,000 USD
>
> 10039
>
> PVD system (Incl. Refurb.)
>
> Varian
>
> 3290
>
> No
>
> 6"
>
> Nov '00
>
>
> PVD01
>
> Sputter (Custom)
>
> VAS
>
> Custom-Built
>
> Yes
>
> 6/8"
>
> May '01
>
>
> Various
>
> Spin Rinse Dryer
>
> Verteq
>
> 1600-55A
>
> No
>
> 6"
>
> Jun '00
>
> Qty 2 single and 3 double stack available
>
> *Metrology Equipment*
>
>
>
>
>
>
>
>
> FTIR01
>
> F T I R 
>
> Biorad/Accent Opto
>
> QS-2200-ME
>
>
> 6"/8"
>
> Aug '03
>
> Excellent condition, one SMIF, one open cassette
>
> RES01
>
> Resitivity measurement
>
> CDE
>
> ResMap 168
>
> Yes
>
> 6/8"
>
> Sep '01
>
>
> MMA01
>
> MEMS motion analyser
>
> ETEC
>
>
> N.A
>
> N.A
>
>
>
> 10042
>
> Macro Defect Detection 
>
> KLA-Tencor
>
> ILM-2401
>
> Yes
>
> 6"
>
> Jul '00
>
> Deinstalled, available with all documentation, Cds, KLA deinstall
> report, crated, barrier bagged, stored in CO USA. Inspection available
> by appointment. Completely new andunused, only installed and then
> deinstalled by KLA.Cost $700K USD new. Price: 120,000 EURO
>
> CONTA01
>
> Unpatterned wafer inspection
>
> KLA-Tencor
>
> '6220
>
> Yes
>
> 6/8"
>
> Sept '01
>
> Perfect condition, priced to sell fast at $125,000 USD
>
>
> ELLIP01
>
> Ellipsometer 
>
> Leica
>
> APECS 3000
>
> Yes
>
> 6/8"
>
> Mar '02
>
> Like new condition
>
> 10017,26
>
> Microscope - wafer handler only
>
> Nikon
>
> NWL860
>
>
>
> 1995
>
> Just handler, qty 2 available
>
>
>
> Ellipsometer
>
> Plasmos
>
> SD8000
>
> Yes
>
> 6/8"
>
>
> Any reasonable offers considered
>
> PRO01
>
> Mechanical Profilometer 
>
> Veeco
>
> V200SL
>
> Yes
>
> 6/8"
>
> Sep '01
>
> Like new condition
>
> MIC02,03,04
>
> Optical Microscope w/air table
>
> Zeiss
>
> Axiotron 2
>
> Yes
>
> 6/8"
>
> Aug '01
>
> Qty 3 available, $20,000 USD each
>
> MIC01
>
> Optical Microscope with Auto Loader
>
> Zeiss
>
> Axiotron 2 with ZML 200 autoloader
>
> Yes
>
> 6/8"
>
> Aug '01
>
>
> INSPEC01
>
> Optical inspection station
>
> Zeiss
>
> Axiosprint
>
> Yes
>
> 6/8"
>
> Aug '01
>
>
> *Backend Equipment*
>
>
>
>
>
>
>
>
> 99000180
>
> Prober
>
> Electroglas
>
> 2001X
>
> No
>
> 12"
>
> 1997
>
> Custom loader for 12 inch wafers
>
> PROBE 01
>
> Semi Automatic Prober
>
> K & W
>
> ANA 8PC
>
> No
>
> 6"
>
> May '01
>
>
> PROBE 02
>
> Semi Automatic Prober
>
> K & W
>
> ANA 8PC
>
> No
>
> 6"
>
> Aug '01
>
>
> PROBE 03
>
> Automatic Prober 
>
> TEL 
>
> P12XL
>
> Yes
>
> 12"
>
> Mar '02
>
> UNUSED, loader adapted for special 12 inch wafer
>
> 10230
>
> Detaper
>
> Dymatix
>
> No model number
>
> N.A.
>
> N.A.
>
> Mar '00
>
> Any reasonable offer accepted
>
> *Wet Equipment*
>
>
>
>
>
>
>
>
> 10011
>
> Automatic Quartz Tube Cleaner
>
> Polyflow
>
> OmniClean S-720
>
>
>
> Jun '00
>
>
> 10015
>
> Box Washer
>
> ATCOR
>
> '2410
>
>
>
> 2001
>
>
> PANNET01
>
> Box Washer
>
> ATCOR
>
> '6410
>
>
>
> 2001
>
>
> PAACI01
>
> Custom Hoods
>
> Fluidair
>
> Custom Acid,Solvent,Base hoods
>
> Yes
>
> 6"/8"
>
> Aug '01
>
> Excellent condition-like new
>
> 10071
>
> Solvent hood - 1 
>
> Reynolds Tech
>
> Custom
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10073
>
> Acid hood - Manual 
>
> Reynolds Tech
>
> Custom
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10074
>
> Acid hood - Manual 
>
> Reynolds Tech
>
> Custom
>
> Yes
>
> 6"
>
> Jun '00
>
>
> 10077
>
> Plating hood - 1 
>
> Reynolds Tech
>
> Custom
>
> No
>
> 6"
>
> Aug '00
>
>
> 10079
>
> Bottle Washer
>
> Reynolds Tech
>
> Custom Hood
>
>
>
> 2000
>
>
> WETETCH01
>
> Wet Spray Etch
>
> Semitool
>
> Spectrum
>
> Yes
>
> 6/8"
>
> Aug '01
>
>
> 99000103
>
> Mask Cleaner
>
> Ultratech
>
> 603
>
>
>
> 2000
>
>
> 10059
>
> Acid hood - Auto - 3 modules
>
> Verteq
>
> Custom
>
> Yes
>
> 6"
>
> Jun '00
>
>
> *Pumps*
>
>
>
>
>
>
>
>
> 10083
>
> Vacuum Pump
>
> Ebara
>
> AAL10
>
> N/A
>
> N/A
>
> Jul '00
>
>
> 10089
>
> Vacuum Pump
>
> Ebara
>
> AA10N
>
> N/A
>
> N/A
>
> Jul '00
>
>
> 10090
>
> Vacuum Pump
>
> Ebara
>
> AAL10
>
> N/A
>
> N/A
>
> Jul '00
>
>
> 10091
>
> Vacuum Pump
>
> Ebara
>
> AAL10
>
> N/A
>
> N/A
>
> Jul '00
>
>
> 10109
>
> Vacuum Pump
>
> Ebara
>
> AAS200WN
>
> N/A
>
> N/A
>
> Jul '00
>
>
> 10110
>
> Vacuum Pump
>
> Ebara
>
> AAS200WN
>
> N/A
>
> N/A
>
> Jul '00
>
>
> 10111
>
> Vacuum Pump
>
> Ebara (new in crate)
>
> AAS200WN
>
> N/A
>
> N/A
>
> Jul '00
>
>
>
> Vacuum Pump Module Dry
>
> Edwards
>
> Booster EH1200
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Edwards
>
> Booster EN2600
>
>
>
> 2000
>
>
>
> Vacuum Pump Module Dry
>
> Edwards
>
> Booster QMB250
>
>
>
> 2000
>
>
>
> Vacuum Pump
>
> Leybold
>
> D60AC
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Ruvac
>
> Blower AU 250
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Ruvac
>
> Blower AU 250
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Ruvac
>
> Blower AU 250
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Ruvac
>
> Blower AU 250
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Ruvac
>
> Blower AU 250
>
>
>
> 2000
>
>
>
> Vacuum Pump Module
>
> Ruvac
>
> Blower AU500
>
>
>
> 2000
>
>
> *Facilities*
>
>
>
>
>
>
>
>
>
> Valve Manifold Box
>
> Matheson
>
> SGS 6000E
>
>
>
> 2000
>
>
>
> Blower
>
> Pfeiffer
>
> WPK500
>
>
>
> 2000
>
>
> 10151
>
> Helium Leak Detector
>
> Alcatel
>
> ASM 180 TD+
>
>
>
> May '00
>
> Brand new, price $20,000 usd
>
> ETU01
>
> Cleanroom Oven
>
> Heraeus
>
> UT 6060
>
> Yes
>
> 6"/8"
>
> Feb '02
>
> Brand new
>
>
> Air Cooling Unit
>
> Pomona Air
>
>
>
>
> 2000
>
>
> 99000354
>
> Water Cooling Unit
>
> Tek-Temp
>
> TDK 100
>
>
>
> 2000
>
>
> 99000233
>
> Table
>
> Clean Air
>
> 36" X 72"
>
>
>
> 2000
>
>
>
> Table
>
> Clean Air
>
> 36" X 72"
>
>
>
> 2000
>
>
>
> Table
>
> Clean Air
>
> 30" X 48"
>
>
>
> 2000
>
>
>
> Table
>
> Clean Air
>
> 39" X 108"
>
>
>
> 2000
>
>
> 99000463
>
> Quartz Storage
>
> Air Control
>
> Custom
>
>
>
> 2000
>
>
> 99000364
>
> Flow Control Calibration
>
> Califlow
>
> Model 100
>
>
>
> 2000
>
>
>
> Chiller
>
> Nes-Lab
>
> CFT-25
>
>
>
> 2000
>
>
>
> Drum Handler
>
> Valley Craft
>
> New on pallet
>
>
>
> 2000
>
>
>