> i need to inpect some bonded wafers for bubbles at
> interface using IR imaging. I have got an infrared
> source . i want to know that can i make use of a
> normal photographic camera with an IR sensitive film
> for this kind of imaging? suggestions for any other
> changes that can make a normal photographic camera to
> work for IR imaging are welcomed.
[FLUFF TRIMMED]
Use an black-and-white CCD camera.
Make sure no additional filter is added.
For the source, a bright incandescent lamp such as a flood lamp works fine.
Visible light is filtered out by the wafer.
Just enough IR that can be detected by the Si CCDs gets though for a good
image.
--Kirt Williams, Ph.D. consultant