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MEMSnet Home: MEMS-Talk: IR inspection of bonding interface
IR inspection of bonding interface
2003-09-26
taya sunil
2003-09-26
Kirt & Erika Zipf-Williams
IR inspection of bonding interface
Kirt & Erika Zipf-Williams
2003-09-26
> i need to inpect some bonded wafers for bubbles at
> interface using IR imaging. I have got an infrared
> source . i want to know that can i make use of a
> normal photographic camera with an IR sensitive film
> for this kind of imaging? suggestions for any other
> changes that can make a normal photographic camera to
> work for IR imaging are welcomed.
[FLUFF TRIMMED]

Use an black-and-white CCD camera.
Make sure no additional filter is added.
For the source, a bright incandescent lamp such as a flood lamp works fine.
Visible light is filtered out by the wafer.
Just enough IR that can be detected by the Si CCDs gets though for a good
image.
    --Kirt Williams, Ph.D.   consultant



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