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MEMSnet Home: MEMS-Talk: DRIE for through wafer openings
DRIE for through wafer openings
2003-10-01
Sam Beal
DRIE for through wafer openings
Sam Beal
2003-10-01
Hi
I am lookng for DRIE services, preferrably in silicon valley.

I have an integrated circuit application requiring an array of large, deep
openings.
Specically I have 6" wafers. I would like to create an array of vias 300um (or
more) deep. Each via is 400um (or more) diameter and a wafer could contain
10,000 or more.

Sam Beal
JigSawtek
San Jose, CA
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