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MEMSnet Home: MEMS-Talk: help for a reciepe of sub-100nm Photoresist
help for a reciepe of sub-100nm Photoresist
2003-10-05
Jiantao Zheng
help for a reciepe of sub-100nm Photoresist
Jiantao Zheng
2003-10-05
hi,
I am looking for a sub-100nm photoresist after
spinning. Due to our equipment limitation, I have use
UV exposure. I was told that I can use Thinner P mixed
with 1805 PR to obtain sub 100nm thickness. Does
anyone has some experience in this? How about the
uniformity of the thicknes?

thanks!



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