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MEMSnet Home: MEMS-Talk: Wet etch Copper
Wet etch Copper
2003-10-05
Linda LW CHOW
Wet etch Copper
Linda LW CHOW
2003-10-05
Hello,

Any suggestions in Wet etch copper on wafer with least lateral etch?
I search from google.com that HCL + HNO3 is suggested. May I ask if CuCl
soluble in HNO3?

Thank you!
Linda:)

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