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MEMSnet Home: MEMS-Talk: Wafer cleaning
Etching Method
2003-10-08
Choe,S-H
2003-10-08
Sooje Cho
2003-10-09
Ashwin Seshadri
Wafer cleaning
2003-10-13
maryla krolikowska
2003-10-13
NANO-MASTER, Inc.
Resistance ICs
2003-10-14
Jim Intrater
Resistance ICs (Correction)
2003-10-14
Jim Intrater
2003-10-09
Burkhard Volland
Wafer cleaning
NANO-MASTER, Inc.
2003-10-13
Dear Maryla,

We build megasonic single wafer cleaners. Please check our web page or
give me a call.

B. Kuyel, Ph.D.
Nano-Master Inc.
Nanomaster.com, 512 385 4552

-----Original Message-----
From: mems-talk-bounces+main=nanomaster.com@memsnet.org
[mailto:mems-talk-bounces+main=nanomaster.com@memsnet.org] On Behalf Of
maryla krolikowska
Sent: Monday, October 13, 2003 2:28 AM
To: General MEMS discussion
Subject: [mems-talk] Wafer cleaning

Hi
I need to recycle Si wafers with 2.5 micron  SiO2 layer   and wafers
with LPCVD SiN layer
I would appreciate any advice on a safe cleaning process  for both
SiO2 as well as for LPCVD SiN.

Thank you in advance
maryla
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