Silicon Genesis has Plasma Immersion (PIII)

www.sigen.com

-----Original Message-----
From: Mark M Crain [mailto:mark.crain@louisville.edu]
Sent: Wednesday, October 22, 2003 12:51 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Ion Implantation Systems


Is anyone aware of a commercial supplier of plasma source ion
implantation systems?

Mark Crain
University of Louisville

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