Hello.

I recommend these books for you. It will be great help for your exiperiment.

1. Fundamentals of Microfabrication 2nd ed.
    Marc J. Madou , CRC press
    This book can be called an encyclopedia of mems technology at present.
    Especially , it has many references source. so you can find easily the
original paper which you want to read.

 2. Microsytem Design
     Stephen D. Senturia , Kluwer Academic Publishers
     This book is easy to read and understand.
     It also shows a lot of  skills and techs. about on desigining
microsytem.

If you have another good information, please let me know that.
Thanks.

Choe,S-H
Esashi Lab. Tohoku Univeristy.
E-Mail: [email protected]