Fluorine etchants like CF4 will not damage Al or Cr. You might see some
erosion on the metal but that is mostly due to power & pressure parameters
rather than the gas.
Mubeen Almoustafa
Process Engineer
Trion Technology
-----Original Message-----
From: Yilei Zhang [mailto:ylzhang@iastate.edu]
Sent: Friday, October 31, 2003 10:23 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] sio2 etchant
Hi all,
Is there any sio2 etchant that will not damage metal mask, for example,
chrome
or Al? thanks.
Regards,
Yilei Zhang