Generally the tool owner (engineer) will set up calibration
instructions that can be run by the process techs/operators.
-----Original Message-----
From: Lau, Phil (UK) [mailto:phil.lau@baesystems.com]
Sent: Thursday, November 06, 2003 6:41 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Monthly MetrologyTool checks...
I'vd been asked to post this question to the mems group,
many whom I suspect are (were) involve in the Silicon Semiconductor
fraternity [industry]:
*******************************************************
>From 'past experience', who is responsible for the
calibration of Metrology tools, eg Linewidth kits,
SEMs, 'Surfscans' systems, etc?
(eg, equipment eng, process technicians or porcess engs).
*******************************************************
Some sort of demographic response would be appreciated.
phil lau
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