Peter,

Check out the following articles:
Cetiner, B.A.; Qian, J.Y.; Chang, H.P.; Bachman, M.; Li, G.P.; De Flaviis, F ,
"Monolithic integration of RF MEMS switches with a diversity antenna on PCB
substrate," IEEE Transactions on Microwave Theory and Techniques, Volume: 51
Issue: 1, pp. 332-335, Jan 2003.

B. A. Cetiner, H. P. Chang, J. Y. Qian, M. Bachman, G.-P. Li, and F. De Flaviis,
"RF MEMS switches fabricated on low cost microwave laminates using low
temperature processes," Transactions on MTT special issue on RF MEMS, December
2002.

The process planarizes SU-8 and other resists using an embossing technique
called "COMP".

-Mark Bachman.

----- Original Message -----
From: "Peter Blennow" 
To: 
Sent: Friday, November 07, 2003 2:14 AM
Subject: [mems-talk] Planarization of SU-8


> Hi all,
>
> I am working in a project where we try to planarize different dielectrics. I
> wonder if anyone has some experience or some general idea on how to
> planarize SU8? I have made extensive research on different CMP articles but
> I can't find anyone who has tried CMP with SU8. I would be grateful for any
> suggestions.
>
>
> Best regards,
>
> Peter Blennow
>
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