Thermal coefficient of expansion on SI vs orientation
D H Grantham
2003-11-13
Hi, Ken: If you've not already gotten an answer to your question regarding
coefficient of expansion, I can tell you that there is a difference. {111}
shows isotropic behavior in the plane of the wafer, as I recall. I don't have
the numbers off the top of my head but can tell you that there are handbook
answers regarding these and and similar properties. I do not recall that
resistivity makes a big difference.
harry grantham