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MEMSnet Home: MEMS-Talk: diffusivity of Boron and Phosphorus in (111) silicon
diffusivity of Boron and Phosphorus in (111) silicon
2003-11-18
jzhao@nd.edu
diffusivity of Boron and Phosphorus in (111) silicon
jzhao@nd.edu
2003-11-18
I am interested in knowing if there is any significant difference with the
diffusivity in (100) silicon. Anyone can direct me into any reference?
Thanks a lot




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