Hi Cindy,
I think Platinum when deposited over Silicon forms Platinium Silicide
which has important consequences when u make a device. Platinum
and Silicon atoms diffuse to form a Pt silicide phase(PtSix). Due to weak
bonding with the silicide phase, it 'could be' that the platinum peels
off.
But I haven't observed any peeling other than the formation of silicides.
Here are some reference papers which might be helpful
The interaction between platinum films and silicon substrates: Effects of
substrate bias during sputtering deposition
J. Shi, D. Kojima, and M. Hashimoto
Journal of Applied Physics Vol 88(3) pp. 1679-1683. August 1, 2000
Pt2Si and PtSi formation with high-purity Pt thin films
C. Canali, C. Catellani, M. Prudenziati, W. H. Wadlin, and C. A. Evans,
Jr.
Applied Physics Letters Vol 31(1) pp. 43-45. July 1, 1977
Growth rates for Pt2Si and PtSi formation under UHV and controlled impurity
atmospheres
C. A. Crider and J. M. Poate
Applied Physics Letters Vol 36(6) pp. 417-419. March 15, 1980
greetings,
Rajesh