Hello dear MEMS group!

Does anyone know a good literature reference that gives a comparison between
LIGA, dry-etching, wet-etching, SU-8 and other MEMS-processes with respect to
possible aspect ratios, geometrical flexibility etc....

I started to look for some literature and there's lots out there. Maybe someone
in the group can help me to focus quickly on the really important papers dealing
with this issue!


Best regards,

Stephan