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MEMSnet Home: MEMS-Talk: Plasma Silicon Etching
Plasma Silicon Etching
2003-12-04
Ha Duong Ngo
2003-12-18
Martin.WALKER@oxinst.co.uk
Plasma Silicon Etching
Ha Duong Ngo
2003-12-04
dear all,

i'm looking for information about deep silicon etching for
via holes fabrication (side wall 70 or 80 degrees for further
metallization).

I would be grateful for any suggestions.

Ngo


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