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MEMSnet Home: MEMS-Talk: MEMS wafer dicing
MEMS wafer dicing
2003-12-08
qmo@mail.utexas.edu
MEMS wafer dicing
qmo@mail.utexas.edu
2003-12-08
Hi,

I am looking for some suggestions for MEMS wafer dicing, either suitable
techniques or mature service provider. What I am working on is 4 inch wafer made
by wafer bonding and bulk micromachining. The device can not be exposed to water
as you know. I have tried laser dicing; the results are not very good.

I really appreciate your suggestions and information.

Best regards,

Qingwei




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