Dear MEMS team..

Is there any way of making two V grooves (one smaller and one bigger) touching
each other? smaller one has dimension of 75 microns width and larger has
dimension of 225 microns wide.. I mean there has to be no gap between the two V
groove and smaller V groove opens up to a larger V groove like a channel..  I am
trying the wet etching using some techniques like giving a small gap between the
two V grooves and etch it in KOH. but not working.. is there any other
techniques anyone can suggest me or any suggestions in wet etching by which i
can get the desired results?

thanks
ganesh



Ganesh R. Iyer
(H)    607 729 9499
(Lab) 607 777 4969



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