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MEMSnet Home: MEMS-Talk: SiN deposition on glass
SiN deposition on glass
2003-12-17
Indu Shekhar Bajpayee ; JPA(DFM)
2003-12-17
Ravi Mullapudi
2003-12-19
Indu Shekhar Bajpayee ; JPA(DFM)
2003-12-19
Isaac Wing Tak Chan
SiN deposition on glass
Indu Shekhar Bajpayee ; JPA(DFM)
2003-12-19
Hi Ravi....
thanks for the reply.
i need some information regarding the power , pressure, the gases and
their flow rate ratio for the RF sputtering.i am using Technics 4400
machine.Kindly tell me the  depositon rates at various parameters.
additionly, i have deposited the same on few samples, but unable to
clarify whether it is depoaited on the glass or not, however it is
deposited on the Si placed with glass.will it reflect any color..
thanks..

INDU SHEKHAR BAJPAYEE
JPA, MICROELECTRONICS CENTER
INDIAN INSTITUTE OF TECHNOLGY
KHARAGPUR
WEST BENGAL -721302



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