A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: adjacent V-grooves
adjacent V-grooves
2003-12-19
Pavel Neuzil
adjacent V-grooves
Pavel Neuzil
2003-12-19
To: giyerr@yahoo.com
Hi Ganesh,
it is possible without any gap as we did it before.
You have to combine LPCVD nitride with thermal
oxidation and 2 KOH etching steps. I will scann the
image and send it to you. The ridge is "knife sharp".
Pavel

__________________________________
Do you Yahoo!?
New Yahoo! Photos - easier uploading and sharing.
http://photos.yahoo.com/


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Harrick Plasma, Inc.
MEMStaff Inc.
Nano-Master, Inc.