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MEMSnet Home: MEMS-Talk: SU-8 50 wrinkling issue
SU-8 50 wrinkling issue
2003-12-12
A.Kanteres@hw.ac.uk
2003-12-15
Michael L
2003-12-15
Brubaker Chad
2003-12-15
A.Kanteres@hw.ac.uk
2003-12-23
A.Kanteres@hw.ac.uk
2003-12-23
Mighty Platypus
Re: SU-8 50 wrinkling issue
2003-12-25
A.Kanteres@hw.ac.uk
SU-8 50 wrinkling issue
A.Kanteres@hw.ac.uk
2003-12-23
Dear experts,
thank you for your valuable input.Preliminary results indicate that the
wrinkling issue has gone away!The problem must of have been solvent
residue from the development of the first layer "reacting" in some way
with the SU-8 during baking.A combination of your recommendations has been
successful.Thanks again and i wish you all merry christmas and a happy new
year!

Anthimos Kanteres
Microsystems Engineering Centre
Edinburgh,UK
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