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MEMSnet Home: MEMS-Talk: How to remove edge bead of negative resist
How to remove edge bead of negative resist
2003-12-23
Yuzhu Li
2003-12-24
Shay Kaplan
How to remove edge bead of negative resist
Yuzhu Li
2003-12-23
I have been using "cover-expose-develop" method to remove edge bead of
positive resist. I had to use aceton Q-tip to srub negative eadge bead, is
there a better way?




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