Composition of NH3OH:H2O2 for high selectivity of GaAs
over AlAs
Sai Raghav Parasa
2004-01-06
Hi,
I want to know the composition of the etchant NH3OH:H2O2, which gives high
selectivity for GaAs over AlAs.
And could anyone tell me the selectivity of the etchant NH4OH-H2O2-H2O,
2:0.7:100 for GaAs over AlAs?
Thanks!
Parasa.
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