Hy Lanzy
I suggest you do wet etching with HF. So best masking layer is poly-Si.
Greetings
Stefan
-----Original Message-----
From: mems-talk-bounces+blunier=imes.mavt.ethz.ch@memsnet.org
[mailto:mems-talk-bounces+blunier=imes.mavt.ethz.ch@memsnet.org] On
Behalf Of lanzy
Sent: Dienstag, 6. Januar 2004 05:03
To: mems-talk@memsnet.org
Subject: [mems-talk] Did anybody try to etching through a glass wafer?
Dear all,
I want to etch through the 7740 glass wafer which is 0.5mm thick. What
kind of material can I use as the mask for etching? I tried PR and Gold
but both failed. I wonder whether you have some expirience to share with
me.
Thank you so much.
Best regards,
Lanzy
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