Hello Friends
can anyone suggest something about the adhesion properties of
sputtered platinum on Silicon/Silicon Dioxide/silicon Nitride or Silicon
oxynitride? Which of all these substrate is best suitable from this point
of view?
Also i want to know about some facility in india who are capable
of sputtering platinum? Can anyone help me out?
Regards
kamal
Kamal Kishore Phone :(0172) 2237401 to 10
Engineer,VLSI:FAB Ext:576,550,570,441
Semiconductor Complex Limited. Fax:(0172)-2236378,2236885
Sector 72(Indl.Area),S A S Nagar,
Mohali, Punjab- 160071