What could be wafer surface temperature during sputter
deposition w/ Al deposition, 10000W, 150sccm Ar flow,
12min deposition time?
Cheol Han
2004-02-05
Could anybody comment what could be the wafer surface temperature during
following sputter deposition?
Al deposition, 10000W, 150sccm Ar flow, 12min deposition time
Any comments should be appreciated. Regards,
Cheol Han
Sr. Packaging Engineer
Packaging Technology Group
National Semiconductor
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