Hi
I am trying to measure the resistance of Germanium Oxide. The Germanium
target (99.999% pure) was sputtered at 10 mTorr pressure at the presence of
43.2 SCCM of Ar and 4.8 SCCM of oxygen flow to get the germanium oxide on
glass plates. The chamber was evacuated upto 3*10^(-)6 torr. I am having
problem with the resistance measurement of the germanium oxide film which
having a thickness of about 1500 A. The voltage drop across the device made
from that germanium oxide was not stable enough to measure the resistance at
different temperatures. Even the resistance is so high that the multi meter
refused to measure it. Actually I need to measure the TCR (temperature
coefficient of resistance) from the resistance value at different
temperature starting from 324 k to 200 k. Does anyone have any idea how can
I measure the resistance? Thank you.
Mukti M Rana
PhD. Student in Electrical Engineering
The University of Texas at Arlington
Room # 208, Nano Fab Center
500 Cooper St. , Box 19072
Arlington, TX 76010, USA
Tel: (817) 272-1265 (Office)
(817) 723-1090 (Cell)